Skip to content

v1.1.0: First working version

Compare
Choose a tag to compare
@demisjohn demisjohn released this 23 Jan 01:55
· 105 commits to master since this release

Uncovered and fixed bugs when jobs were converted and executed for exposure on an ASML PAS 5500/300 stepper system. This release is confirmed to produce good exposures on the stepper and has been tested on jobs requiring complex stitching.

This release supports multiple Layers and multiple Images per layer with arbitrary wafer placement, but does not yet support alignment, alignment mark exposure or optical prealignment. (See branch AlignmentDev for progress on Alignment.)