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plot_wafer(): shows alignment marks
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@demisjohn
demisjohn committed May 9, 2020
1 parent 96bd513 commit f39fe2c
Showing 1 changed file with 87 additions and 39 deletions.
126 changes: 87 additions & 39 deletions ASML_JobCreator/Plot.py
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Original file line number Diff line number Diff line change
Expand Up @@ -33,11 +33,16 @@ def __init__(self, parent=None):



def plot_wafer(self):
def plot_wafer(self, showwafer=True, showmarks=True):
"""
Plot the Wafer layout and distributed Images.
Note that some plotting options, such as font size and axis positioning, are set in __globals.py
Parameters
----------
showwafer, showmarks : True | False, optional
Show the wafer outline marks + edge clearance (showware) and alignment marks (showmarks). Defaults to True.
Returns
-------
fig, ax : Matplotlib Figure and Axis objects containing the schematic. Use these handles to manipulate the plot after generation. Matplotlib Patches are used to draw the shapes.
Expand All @@ -47,7 +52,7 @@ def plot_wafer(self):
import numpy as np

fig, ax = plt.subplots(nrows=1, ncols=1)

LegendEntries = []

## Plot the wafer outline:
# Arc angles:
Expand All @@ -57,9 +62,11 @@ def plot_wafer(self):
A = np.rad2deg( np.arcsin( (F/2) / (D/2) ) ) # arc angle corresponding to 1/2 of wafer flat
else:
A = 2
# matplotlib.patches.Arc(xy, width, height, angle=0.0, theta1=0.0, theta2=360.0) :
wf = mplp.Arc( (0,0) , D, D, angle=-90, theta1=A, theta2=-A , color=Defaults.Plotting_WaferEdgeColor, hatch=Defaults.Plotting_BGHatch)
ax.add_patch( wf )

if showwafer:
# matplotlib.patches.Arc(xy, width, height, angle=0.0, theta1=0.0, theta2=360.0) :
wf = mplp.Arc( (0,0) , D, D, angle=-90, theta1=A, theta2=-A , color=Defaults.Plotting_WaferEdgeColor, hatch=Defaults.Plotting_BGHatch)
ax.add_patch( wf )


## Plot the edge clearance
Expand All @@ -70,8 +77,10 @@ def plot_wafer(self):
Ac = np.rad2deg( np.arcsin( (Fc/2) / (Dc/2) ) ) # arc angle corresponding to 1/2 of wafer flat
else:
Ac = 2
clearance = mplp.Arc( (0,0) , Dc, Dc, angle=-90, theta1=Ac, theta2=(-Ac) , color=Defaults.Plotting_WaferColor, hatch=Defaults.Plotting_BGHatch)
ax.add_patch( clearance )

if showwafer:
clearance = mplp.Arc( (0,0) , Dc, Dc, angle=-90, theta1=Ac, theta2=(-Ac) , color=Defaults.Plotting_WaferColor, hatch=Defaults.Plotting_BGHatch)
ax.add_patch( clearance )


## Plot the Cell grid:
Expand Down Expand Up @@ -127,13 +136,50 @@ def gen_grid(inc, maxval, shift=0):
tick.label1.set_horizontalalignment('center')
#end for(ytick)

ax.grid(True, which='minor', color=Defaults.Plotting_GridColor, linestyle=Defaults.Plotting_GridStyle)
ax.grid(False, which='major')
if showwafer:
ax.grid(True, which='minor', color=Defaults.Plotting_GridColor, linestyle=Defaults.Plotting_GridStyle)
ax.grid(False, which='major')
#end if(showwafer)


# Plot alignment marks
if self.parent.Alignment:
cmap = plt.get_cmap(Defaults.Plotting_MarkColorMap) # cycling colors
c=-1 # colormap index
AlImgs = []
for i, Mrk in enumerate(self.parent.Alignment.MarkList):
if DEBUG(): print("plot_wafer:marks(): MrkImg #%i:\n"%i, Mrk.Image.ImageID, "c=%i"%c )
Iwidth = Mrk.Image.sizeXY[0]
Iheight = Mrk.Image.sizeXY[1]
X = Mrk.waferXY[0] - Iwidth/2
Y = Mrk.waferXY[1] - Iheight/2

Imgi = np.where( np.isin(AlImgs, Mrk.Image) )[0]
if len(Imgi)==0:
# Unlisted Mark Image
c = c+1 # cycle colormap
#end if(Mark added to legend)

R = mplp.Rectangle( (X,Y), Iwidth, Iheight,
facecolor=Defaults.Plotting_MarkFace,
edgecolor=cmap(c),
label=Mrk.Image.ImageID,
alpha=Defaults.Plotting_MarkAlpha,
linewidth=Defaults.Plotting_MarkLineWidth )
ax.add_patch( R )

if len(Imgi)==0:
# Unlisted Mark Image
AlImgs.append( Mrk.Image )
LegendEntries.append( R ) # add once only
if DEBUG(): print("plot_wafer:marks(): ", "\nAdding Legend entry %i\n"%len(LegendEntries), "MrkImg: ", Mrk.Image.ImageID, "c=%i"%c )
#end if(Mark added to legend)
#end for(Imagelist)
#end if(Alignment)


# Plot the distributed images:
cmap = plt.get_cmap("tab20") # cycling colors
LegendEntries = []
cmap = plt.get_cmap(Defaults.Plotting_ImageColorMap) # cycling colors
for i, Img in enumerate(self.parent.ImageList):
Iwidth = Img.sizeXY[0]
Iheight = Img.sizeXY[1]
Expand All @@ -151,6 +197,7 @@ def gen_grid(inc, maxval, shift=0):
#end for(ImgDistr)
#end for(Imagelist)


# Shrink current axis by 20% for legend to fit
box = ax.get_position()
if DEBUG(): print("ax:box=", box.x0, box.y0)
Expand All @@ -166,7 +213,7 @@ def gen_grid(inc, maxval, shift=0):



def plot_reticles(self, scale=False):
def plot_reticles(self, scale=False, showwindow=True, showlens=True):
"""
Plot the Reticle layout(s). If multiple Reticle ID's are detected, multiple reticles will be plotted.
Note that some plotting options, such as font size and axis positioning, are set in __globals.py
Expand All @@ -175,6 +222,9 @@ def plot_reticles(self, scale=False):
----------
scale : True | False, optional
If True, plot at Reticle scale (eg. 4x or 5x, as set in `Defaults.py :: LENS_REDUCTION`). Defaults to False, which plots at 1x wafer-scale.
showwindow, showlens : True | False, optional
If True, show the rectangular reticle table window (showwindow) and circular lens (showlens) outlines. These dimensions are defined in Defaults.py. Both defualt to True.
Returns
-------
Expand All @@ -188,14 +238,9 @@ def plot_reticles(self, scale=False):
else:
Mag = 1.0

# RETICLE_TABLE_SIZE, LENS_DIAMETER
import matplotlib.pyplot as plt
import matplotlib.patches as mplp # for plotting shapes
import numpy as np

# TODO:
# - figure out number of ReticleID's, one axis per
# - loop thru images on each reticle
import numpy as np

Rets,Imgs = self._get_ReticlesPerImage()
figs, axs = [],[]
Expand All @@ -205,25 +250,28 @@ def plot_reticles(self, scale=False):
figs.append(fig)
axs.append(ax)

## Plot the Lens outline:
Lens = mplp.Circle( (0,0), Defaults.LENS_DIAMETER/2.0 * Mag, label="Lens Diameter",
facecolor=Defaults.Plotting_LensColor,
linewidth=Defaults.Plotting_BGOutlineWidth,
edgecolor=Defaults.Plotting_BGOutlineColor,
linestyle=Defaults.Plotting_BGOutlineStyle,
alpha = Defaults.Plotting_Alpha )
ax.add_patch( Lens )


## Plot the Reticle Table outline:
RT = mplp.Rectangle( (-Defaults.RETICLE_TABLE_WINDOW[0]/2.0 * Mag, -Defaults.RETICLE_TABLE_WINDOW[1]/2.0 * Mag), Defaults.RETICLE_TABLE_WINDOW[0] * Mag, Defaults.RETICLE_TABLE_WINDOW[1] * Mag,
label="Reticle Table Window",
facecolor=Defaults.Plotting_ReticleTableColor,
linewidth=Defaults.Plotting_BGOutlineWidth,
edgecolor=Defaults.Plotting_BGOutlineColor,
linestyle=Defaults.Plotting_BGOutlineStyle,
alpha = Defaults.Plotting_Alpha )
ax.add_patch( RT )
if showlens:
## Plot the Lens outline:
Lens = mplp.Circle( (0,0), Defaults.LENS_DIAMETER/2.0 * Mag, label="Lens Diameter",
facecolor=Defaults.Plotting_LensColor,
linewidth=Defaults.Plotting_BGOutlineWidth,
edgecolor=Defaults.Plotting_BGOutlineColor,
linestyle=Defaults.Plotting_BGOutlineStyle,
alpha = Defaults.Plotting_Alpha )
ax.add_patch( Lens )
#end if(showlens)

if showwindow:
## Plot the Reticle Table outline:
RT = mplp.Rectangle( (-Defaults.RETICLE_TABLE_WINDOW[0]/2.0 * Mag, -Defaults.RETICLE_TABLE_WINDOW[1]/2.0 * Mag), Defaults.RETICLE_TABLE_WINDOW[0] * Mag, Defaults.RETICLE_TABLE_WINDOW[1] * Mag,
label="Reticle Table Window",
facecolor=Defaults.Plotting_ReticleTableColor,
linewidth=Defaults.Plotting_BGOutlineWidth,
edgecolor=Defaults.Plotting_BGOutlineColor,
linestyle=Defaults.Plotting_BGOutlineStyle,
alpha = Defaults.Plotting_Alpha )
ax.add_patch( RT )
#end if(showwindow)

ax.set_xlabel("%ix Scale, mm" % (Mag), fontsize=PlotLabelFontSize)
ax.set_ylabel("mm", fontsize=PlotLabelFontSize)
Expand All @@ -232,7 +280,7 @@ def plot_reticles(self, scale=False):


# Plot the defined images:
cmap = plt.get_cmap("tab20") # cycling colors
cmap = plt.get_cmap(Defaults.Plotting_ImageColorMap) # cycling colors
LegendEntries = []
for i, Img in enumerate(Imgs[r]):
#if DEBUG(): print("_get_ReticlesPerImage(): Imgs:\n", Imgs, "\nImg #%i\n"%i, Img)
Expand All @@ -241,7 +289,7 @@ def plot_reticles(self, scale=False):
X = Img.shiftXY[0] * Mag - Iwidth/2
Y = Img.shiftXY[1] * Mag - Iheight/2

R = mplp.Rectangle( (X,Y), Iwidth, Iheight, color=cmap(i), label=Img.ImageID, alpha=1.0, linewidth=Defaults.Plotting_LineWidth )
R = mplp.Rectangle( (X,Y), Iwidth, Iheight, color=cmap(i), label=Img.ImageID, alpha=Defaults.Plotting_Alpha, linewidth=Defaults.Plotting_LineWidth )
ax.add_patch( R )
LegendEntries.append( R ) # add once only
#end for(Imagelist)
Expand Down

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