Added sputtering source (#108)

* Added sputtering source * ruff linting --------- Co-authored-by: Andrea Albino <[email protected]>
FAIRmat-NFDI · Oct 1, 2024 · 372da62 · 372da62
1 parent 860c8b3
commit 372da62
Showing 1 changed file with 119 additions and 0 deletions.
diff --git a/src/nomad_material_processing/vapor_deposition/pvd/sputtering.py b/src/nomad_material_processing/vapor_deposition/pvd/sputtering.py
@@ -38,6 +38,33 @@
     )
 
 from nomad.config import config
+from nomad.datamodel.data import (
+    EntryData,
+)
+from nomad.datamodel.metainfo.annotations import (
+    ELNAnnotation,
+    ELNComponentEnum,
+    Filter,
+    SectionProperties,
+)
+from nomad.datamodel.metainfo.basesections import (
+    CompositeSystem,
+    ReadableIdentifiers,
+    SystemComponent,
+)
+from nomad.metainfo import (
+    Datetime,
+    SubSection,
+)
+
+from nomad_material_processing.general import (
+    Geometry,
+)
+from nomad_material_processing.vapor_deposition.pvd.general import (
+    PVDEvaporationSource,
+    PVDSource,
+    SourcePower,
+)
 
 m_package = SchemaPackage(name='Sputter Deposition')
 
@@ -78,4 +105,96 @@ def normalize(self, archive: 'EntryArchive', logger: 'BoundLogger') -> None:
         super().normalize(archive, logger)
 
 
+class Magnetron(PVDEvaporationSource):
+    """
+    A representation of the magnetron device.
+    """
+
+    m_def = Section(
+        a_plot=dict(
+            x='power/time',
+            y='power/value',
+        ),
+    )
+
+    power = SourcePower()
+
+    Description = Quantity(
+        type=str,
+        a_eln=ELNAnnotation(
+            component='RichTextEditQuantity',
+        ),
+    )
+
+
+class SputteringTarget(CompositeSystem, EntryData):
+    """
+    A representation of the target material used in sputtering. It cointains the target
+    ID, the delivery date and the actual date where the target was installed
+    inside the chamber.
+    """
+
+    m_def = Section(a_eln={'hide': ['datetime']})
+
+    target_id = SubSection(
+        section_def=ReadableIdentifiers,
+    )
+
+    geometry = SubSection(
+        section_def=Geometry,
+        description='Section containing the geometry of the target.',
+    )
+
+    delivery_date = Quantity(
+        type=Datetime,
+        a_eln=ELNAnnotation(
+            component=ELNComponentEnum.DateEditQuantity,
+        ),
+    )
+
+    installation_date = Quantity(
+        type=Datetime,
+        a_eln=ELNAnnotation(
+            component=ELNComponentEnum.DateEditQuantity,
+        ),
+    )
+
+
+class SputteringTargetComponent(SystemComponent):
+    m_def = Section(a_eln={'hide': ['mass_fraction', 'mass']})
+
+    lab_id = Quantity(
+        type=str,
+        a_eln=ELNAnnotation(
+            component=ELNComponentEnum.StringEditQuantity,
+            label='Target ID',
+        ),
+    )
+    system = Quantity(
+        type=SputteringTarget,
+        a_eln=ELNAnnotation(
+            component=ELNComponentEnum.ReferenceEditQuantity,
+        ),
+    )
+
+
+class SputteringSource(PVDSource):
+    """
+    A representation of both the magentron and the target material, which works as
+    a source of atoms for sputtering.
+    """
+
+    m_def = Section(
+        a_eln=ELNAnnotation(
+            hide=['name'],
+            properties=SectionProperties(
+                visible=Filter(exclude=['impinging_flux', 'vapor_molar_flow_rate'])
+            ),
+        ),
+        links=['http://purl.obolibrary.org/obo/CHMO_0002896'],
+    )
+
+    vapor_source = SubSection(section_def=Magnetron, repeats=True)
+
+
 m_package.__init_metainfo__()