SEM_example.xml

<?xml version='1.0' encoding='utf-8'?>
<entry xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://mdmc.kit.edu/schema/sem_metadata" xsi:schemaLocation="http://mdmc.kit.edu/schema/sem_metadata schema.xsd">
 <entryID>
  <identifierValue>www.int.kit.edu/fe3456</identifierValue>
  <identifierType>URL</identifierType>
 </entryID>
 <title>FeMoOx pellet cross section at region of interest</title>
 <startTime>2021-07-13T13:00:00.00</startTime>
 <endTime>2021-07-13T18:23:35.00</endTime>
 <definition>SEM</definition>
 <program>
  <programName>smartSEM</programName>
 </program>
 <user>
  <givenName>Charlotte</givenName>
  <familyName>Neidiger</familyName>
  <role>Research User</role>
 </user>
 <sample>
  <sampleName>FeMoOx_Laser3_Markers</sampleName>
  <conductive>true</conductive>
  <magnetic>false</magnetic>
  <eBeamSensitive>1</eBeamSensitive>
  <iBeamSensitive>1</iBeamSensitive>
  <embeddingMedium>none</embeddingMedium>
  <sampleForm>pellet</sampleForm>
  <sampleSize>
   <value>4</value>
   <unit>mm</unit>
  </sampleSize>
  <finalSpecimen>cross-section</finalSpecimen>
  <sampleHolder>stub</sampleHolder>
  <fixingMethod>silver paint</fixingMethod>
  <conductiveCoatingApplied>0</conductiveCoatingApplied>
  <storageConditions>Ambient, dry environment</storageConditions>
 </sample>
 <instrument>
  <instrumentName>Auriga 60</instrumentName>
  <instrumentManufacturer>
   <manufacturerName>Carl Zeiss NTS GmbH</manufacturerName>
   <modelName>AURIGA60-4618</modelName>
  </instrumentManufacturer>
  <chamberPressure>
   <value>2.16E-06</value>
   <unit>mbar</unit>
  </chamberPressure>
  <eBeamSource>
   <sourceName>GEMINI® column</sourceName>
   <accelerationVoltage>
    <value>5</value>
    <unit>kV</unit>
   </accelerationVoltage>
  </eBeamSource>
  <stage>
   <tiltAngle>
    <value>54</value>
    <unit>degree</unit>
   </tiltAngle>
   <eBeamWorkingDistance>
    <value>5.1</value>
    <unit>mm</unit>
   </eBeamWorkingDistance>
  </stage>
  <imaging>
   <numberOfPixels>
    <xPixels>1024</xPixels>
    <yPixels>768</yPixels>
   </numberOfPixels>
   <pixelSize>
    <xPixelSize>
     <value>74.43</value>
     <unit>nm/pixel</unit>
    </xPixelSize>
   </pixelSize>
   <collectionMethod>normal scan</collectionMethod>
   <apertureSetting>
    <size>
     <value>120</value>
     <unit>um</unit>
    </size>
   </apertureSetting>
   <dwellTime>
    <value>0.12</value>
    <unit>us</unit>
   </dwellTime>
  </imaging>
  <detectors>
   <signalMixingDone>0</signalMixingDone>
   <detector1>
    <detectorType>SE 1 surface electron detection</detectorType>
    <detectorName>InLens</detectorName>
   </detector1>
  </detectors>
  <FIB>
   <angleToEBeam>
    <value>54</value>
    <unit>degree</unit>
   </angleToEBeam>
   <iBeamSource>
    <accelerationVoltage>
     <value>30</value>
     <unit>kV</unit>
    </accelerationVoltage>
    <beamCurrent>
     <value>50</value>
     <unit>pA</unit>
    </beamCurrent>
    <sourceLifetime>
     <value>2104</value>
     <unit>uAh</unit>
    </sourceLifetime>
   </iBeamSource>
   <gunPressure>
    <value>3.73E-08</value>
    <unit>mbar</unit>
   </gunPressure>
  </FIB>
 </instrument>
</entry>